ZHENG, Yang. Non-destructive measurement of SiC Epitaxial Layer Thickness Using FTIR Spectroscopy with Cauchy Dispersion Optimization. Highlights in Science, Engineering and Technology, [S. l.], v. 159, p. 417–429, 2025. DOI: 10.54097/ghqks114. Disponível em: http://drphset.com/index.php/ojs/article/view/58. Acesso em: 19 apr. 2026.